Design & Simulation Software: Sentaurus, Silvaco, COMSOL Multiphysics, Cadence, L-Edit
Silvaco TCAD Simulation |
Sentaurus TCAD Simulation
|
Cadence Layout |
Device/IC Fabrication: Penn State Nanofab User Facility
Lithography Bay |
ALD/Plasma Etch Bay |
ICP-RIE Dry Etcher |
Material Characterization: Penn State Material Characterization Lab User Facility
Raman Spectroscopy |
Device/IC Characterization
RF/Mixed-Signal Measurement up to 67GHz |
Device Irradiation:
Gamma Irradiation (Thanks to PSU Radiation Science & Engineering Center) |