Lab Facilities

Our main laboratory is located in room N125A Millennium Science Complex.  The laboratory currently houses five custom-designed systems that are used for chemical vapor deposition (CVD) and metalorganic chemical vapor deposition (MOCVD) of semiconducting thin films and nanostructures.  The lab includes two MOCVD systems that are part of the 2D Crystal Consortium – Materials Innovation Platform facility for deposition of 2D transition metal dichalcogenides.

Take a 360 degree tour of the N125A CVD Lab

2DCC-MIP Multi-Module MOCVD System for Layered Chalcogenides:

 

 

 

 

 

2DCC-MIP MOCVD System for Layered Chalcogenides:

 

 

 

 

 

Group III-Nitride MOCVD System:

 

 

 

 

 

 

 

Silicon LPCVD System:

Silicon LPCVD System