XPS Versa Probe RSFs

• Si 2p – 1.0
• O 1s –  2.039 (silica), 1.883 (glass)
• Na KLL –  5.288
• Na 1s – 3.882
• Ca 2s – 1.209
• Ca 2p – 4.234
• Mg KLL – 8.708
• K 2p – 4.242
• C 1s – 0.809
• B 1s –  0.359
• Zr 3d – 6.256
• Al 2p – 0.600

XPS Kratos RSFs

• Na 1s – 5.160 (database), 4.936 (calculated)
• O 1s – 2.318 (database), 2.251 (calculated)
• Na KLL – 4.215 (database), 4.455 (calculated)
• Ca 2s – 1.702 (database), 1.695 (calculated)
• Ca 2p – 5.763 (database), 5.155 (calculated)
• Mg KLL – 8.412 (database), 7.455 (calculated)
• K 2p – 4.733 (database), 4.200 (calculated)
• C 1s – 0.977 (database), 0.957 (calculated)
• Si 2p – 1.000 (database), 1.000 (calculated)
• Al 2p – 0.656 (database), 0.652 (calculated)

* RSFs are normalized to Si 2p

** Use database RSFs for all elements when other elements are present in the glass than the ones listed above (do NOT mix and match).

*** RSFs are subjected to change. For the most up-to-date RSFs, contact Jeff Shallenberger (MCL staff)